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Standard and/or project under the direct responsibility of ISO/TC 202/SC 4 Secretariat Stage ICS
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
95.99
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
90.93
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
90.60
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
60.60
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
90.93

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