Reference number
ISO 13424:2013
International Standard
ISO 13424:2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
Edition 1
2013-10
Read sample
ISO 13424:2013
53773
Published (Edition 1, 2013)
This publication was last reviewed and confirmed in 2021. Therefore this version remains current.

ISO 13424:2013

ISO 13424:2013
53773
Language
Format
CHF 173
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Abstract

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

General information

  •  : Published
     : 2013-10
    : International Standard confirmed [90.93]
  •  : 1
     : 46
  • ISO/TC 201/SC 7
    71.040.40 
  • RSS updates

Life cycle

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