Abstract
This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
General information
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Status: PublishedPublication date: 2022-08Stage: International Standard to be revised [90.92]
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Edition: 1Number of pages: 11
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Technical Committee :ISO/TC 112ICS :23.160
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ISO/DIS 24477
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
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Under developmentISO/DIS 24477