International Standard
ISO/TR 15969:2021
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Reference number
ISO/TR 15969:2021
Edition 2
2021-03
© ISO 2024
International Standard
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Published (Edition 2, 2021)

ISO/TR 15969:2021

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Abstract

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling. 

The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.

General information

  • Status
     : Published
    Publication date
     : 2021-03
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 13
  • Technical Committee :
    ISO/TC 201/SC 4
    ICS :
    71.040.40 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

7
Affordable and Clean Energy
9
Industry, Innovation and Infrastructure

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