ISO 13083:2015

Published (Edition 1, 2015)

This standard was last reviewed and confirmed in 2022. Therefore this version remains current.

ISO 13083:2015

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Abstract

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

General information

Status
: Published

Publication date
: 2015-08

Stage
: International Standard confirmed [90.93]
Edition
: 1

Number of pages
: 14
Technical Committee :
ISO/TC 201/SC 9

ICS :
71.040.40
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