International Standard
ISO 13084:2018
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Reference number
ISO 13084:2018
Edition 2
2018-11
© ISO 2024
International Standard
Read sample
Published (Edition 2, 2018)
This standard was last reviewed and confirmed in 2024. Therefore this version remains current.

ISO 13084:2018

Format
Language
CHF 96
Convert Swiss francs (CHF) to your currency

Abstract

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

General information

  • Status
     : Published
    Publication date
     : 2018-11
    Stage
    : International Standard confirmed [90.93]
  • Edition
     : 2
    Number of pages
     : 15
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

3
Good Health and Well-being
9
Industry, Innovation and Infrastructure

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

  2. Store
  3. Standards catalogue
  4. ICS
  5. 71
  6. 71.040
  7. 71.040.40
  8. ISO 13084:2018