Abstract
PreviewThis document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
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Status: PublishedPublication date: 2021-04
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Edition: 1Number of pages: 15
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- ICS :
- 17.020 Metrology and measurement in general
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| Format | Language | |
|---|---|---|
| std 1 92 | PDF + ePub | |
| std 2 92 | Paper |
- CHF92
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